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本文介绍一种工件表面直线度误差的高准确度测量原理。它的特点是:通过测量两个已知距离的固定原点分别到工件表面的距离来求得工件表面直线度误差。应用双频激光干涉仪测长装置,通过旋转平面反射镜进行光束跟踪,用电容测头瞄准工件进行测量。测量精度不低于0.4μm/m。
This article describes a high degree of accuracy of the workpiece surface straightness error measurement principle. Its characteristic is: Obtain the straightness error of the workpiece surface by measuring the distance from the fixed origin of two known distances to the surface of the workpiece respectively. The dual-frequency laser interferometer is used to measure the length of the device. The beam is tracked by rotating the plane mirror and the workpiece is measured with a capacitance probe. Measurement accuracy of not less than 0.4μm / m.