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对电荷耦合器件(CCD)交流成像中存在的背景发白、亮条、亮点、拖影和固定图像噪声等不良背景进行了分析,并提出了调整栅介质生长方法、本征吸杂、低温退火等消除不良背景的具体工艺方法,获得了高质量的CCD器件。测试结果表明,其交流成像中的不良背景得到了有效控制。
The adverse background such as white background, bright spots, bright spots, smear and fixed image noise existed in the AC CCD imaging were analyzed. The methods of adjusting the gate dielectric growth method, intrinsic gettering, low temperature annealing Such as eliminating the bad background of the specific process, access to high-quality CCD devices. The test results show that the adverse background in the AC imaging has been effectively controlled.