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光刻伺服盘是一种新的磁头伺服定位技术。本文分析了利用高频溅射法刻蚀光刻伺服盘的刻蚀机理,并对主要的刻蚀参数如溅射电压、气体压力等对刻蚀精度的影响作了比较详细的讨论。
Lithography servo disk is a new head servo positioning technology. In this paper, the etching mechanism of high speed sputtering etching lithography servo disc is analyzed, and the influence of the main etching parameters such as sputtering voltage and gas pressure on the etching accuracy is discussed in detail.