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转子是分子泵的关键部件,其结构参数的设计需要从抽气性能、转子动力学和强度等方面综合考虑,经过多次迭代才能满足要求,设计过程很复杂。本文采用多学科设计优化理念,基于优化总控软件平台,开发了应用接口软件,集成UG NX、ANSYS、MATLAB等软件,实现抽气性能计算、参数化几何建模、转子动态特性分析、应力与应变计算等功能模块的数据共享和优化迭代,对转子的结构参数进行自动优化,得到了优化的转子结构参数,为高质量、高效率开发系列化分子泵产品提供了技术支撑。
The rotor is a key component of the molecular pump. Its structural parameters need to be comprehensively considered from the aspects of pumping performance, rotor dynamics and strength. After many iterations to meet the requirements, the design process is very complicated. Based on the optimized total control software platform, this paper develops application interface software and integrates softwares such as UG NX, ANSYS and MATLAB to realize the calculation of extraction performance, parametric geometric modeling, analysis of rotor dynamic characteristics, stress and stress Strain calculation and other functional modules to optimize the structural parameters of the rotor, optimize the rotor structure parameters, and provide technical support for the development of high-quality, high-efficiency serial molecular pump products.