研究了过滤阴极真空电弧技术中,不同的磁过滤器电流下(5—13A),制备的四面体非晶碳(ta-C)薄膜对摩擦学特性的影响.通过对薄膜厚度,薄膜结构以及薄膜表面粗糙度随磁过滤电流的变化结果进行了测试,结果表明,随着磁过滤器电流的增大,薄膜的sp3键含量逐渐减少,表面粗糙度从0.13增大到0.38.磁过滤器电流在5A时,薄膜的摩擦系数最小约为0.08,当电流增大到7A时,摩擦系数显著增大,磁过滤器电流从7A增大到13A时,薄膜的摩擦系数再次减小约为0.1. The effects of the prepared tetrahedron amorphous carbon (ta-C) films on tribological properties at different magnetic filter currents (5-13A) were studied in the filtered cathode vacuum arc technique. The effects of film thickness, film structure, The results show that the sp3 bond content decreases and the surface roughness increases from 0.13 to 0.38 with the increase of the magnetic filter current.The magnetic filter current At 5 A, the friction coefficient of the film is about 0.08. When the current increases to 7A, the friction coefficient increases significantly. When the current increases from 7A to 13 A, the friction coefficient of the film decreases again to about 0.1.