TeOx thin films were prepared by vacuum evaporation of TeO2 powder. Structural characteristic and surface mor-phology of the as-deposited films was analyzed by using X-ray photoelectron spectroscopy, transmission electron microscopy, X-ray diffractometer and atomic force microscopy. It was found that the films represented a two component system comprising Te particies dispersed in an amorphous TeO2 matrix. The dispersed Te particies were in a crystalline state. The TeOx films showed a finely granular structure and a rough surface. Results of the statie recording test showed that the TeOx films had good writing sensitivity for short-wavelength laser beam (514.5 nm). Primary results of the dynamic test at 514.5 nm were also reported. The TeOx films were suitable for using as a blue-green wavelength high density optical storage medium. TeOx thin films were prepared by vacuum evaporation of TeO2 powder. Structural characteristic and surface mor-phology of the as-deposited films was analyzed by using X-ray photoelectron spectroscopy, transmission electron microscopy, X-ray diffractometer and atomic force microscopy. It was found that the images represented a two-component system comprising Te particies dispersed in an amorphous TeO2 matrix. The dispersed Te particles were in a crystalline state. The TeOx films showed a finely granular structure and a rough surface. Results of the statie recording test showed that the TeOx films had good writing sensitivity for short-wavelength laser beam (514.5 nm). Primary results of the dynamic test at 514.5 nm were also reported. The TeOx films were suitable for using as a blue-green wavelength high density optical storage medium.