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拉深成形可以用来制备形状复杂的零部件,甚至可达微加工水平。采用磁控溅射方法,在基底温度分别为310K和433K下,制备了厚度约为15μm的两种不同的AlZr薄膜。将这两种薄膜做为坯料,采用冲头直径为0.75mm的微拉深设备研究其拉深性能。虽然这两种材料在拉伸试验中显示出较小的最大应变,但还是成功地实现了微拉深成形。在基底温度为310K和433K制备的两种材料的极限拉深比分别为1.8和1.7。这些结果比先前采用AlSc合金的结果要好,与采用传统轧制方法所得纯铝薄膜的拉深结果相似。结果表明,采用磁控溅射方法制备的薄膜可以用来进行微拉深成形。
Deep drawing can be used to make complex-shaped parts even up to micro-machining levels. Using magnetron sputtering method, two different AlZr thin films with a thickness of about 15μm were fabricated at substrate temperatures of 310K and 433K, respectively. Both films were used as blanks, and their drawing properties were studied using a micro-drawing device with a punch diameter of 0.75 mm. Although both materials showed smaller maximum strain in the tensile test, micro-drawing was successfully achieved. The ultimate draw ratios of the two materials prepared at substrate temperatures of 310K and 433K were 1.8 and 1.7, respectively. These results are better than previous results with AlSc alloys, similar to those obtained with conventional aluminum rolling. The results show that the film prepared by magnetron sputtering method can be used for micro-drawing.