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建立了电容式微加速度计的结构模型，运用有限元分析方法对其进行模态分析，研究了微加速度计结构尺寸对谐振频率和模态振型的影响，得出了结构尺寸对这两者的影响规律，为此类加速度计的结构设计提供了依据。
The structure model of the capacitive micro-accelerometer was established. The modal analysis of the micro-accelerometer was carried out. The influence of the structure size of the micro-accelerometer on the resonant frequency and mode shape was studied. Influence law, provided the basis for the structure design of such accelerometer.