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热电视象管的空间分辨率可用热电靶面网格化得到有效的改善。本文描述在氘化硫酸三甘肽(DTGS)上制备高质量网格化视象管靶技术和结构的进展。网格化靶结构尺寸利用理论分析的结果进行选择。网格化靶用低能离子束铣DTGS薄靶制得。本文描述这种材料的离子束刻蚀特性,讨论了掩模材料、支撑层和信号电极的选择。仔细研究大量视象管的靶表明,成象的性能和象质之所以有差别,乃是靶的形状和刻蚀过程不一引起的。研制得到最佳的靶面制备和工艺流程,使分辨率得到有效的改进,并超过平面靶管,从而取得令人满意的图象。
The spatial resolution of the thermopipe can be effectively improved by the gridding of the thermoelectric target. This article describes the progress in the fabrication of high quality, gridded tube imaging technologies and structures on deuterated triglycerides (DTGS). The meshing target structure size is selected based on the results of theoretical analysis. Meshized targets were fabricated using low energy ion beam milling DTGS thin targets. This article describes the ion beam etching properties of this material, and discusses the choice of mask material, support layer, and signal electrode. A careful examination of a large number of video tube targets indicates that the difference in imaging performance and image quality is caused by the difference in target shape and etching process. Developed the best target preparation and process flow, the resolution is effectively improved, and beyond the plane of the target tube, so as to obtain a satisfactory image.