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反射差分光谱术(RDS)是研究材料表面和薄膜光学各向异性属性的重要手段.现有的技术以光弹调制器(PEM)式单通道测量模式为主,可以实时监测单个波长的反射差分信号,但全光谱测量则需要采用扫描波长的方式完成,耗时长,不适合在线监测等时效性强、全光谱测量的应用.在研究基于光弹调制器的多通道反射差分光谱仪的技术实现的基础上,结合虚拟仪器技术、高速多通道同步采集卡和数字锁相放大算法,提出一种新的多通道测量构架.实验表明,新方法在全光谱范围内测量信号的标准偏差小于10-3,在仪器开发上具有组合灵活、扩展性好等优点.
Reflected differential spectroscopy (RDS) is an important method to study the optical anisotropy of material surface and film. The existing technology is mainly based on the single-channel measurement mode of photoelastic modulator (PEM), which can monitor the reflection difference of single wavelength in real time Signal, but the full spectrum measurement needs to be completed by the way of scanning wavelength, long time consuming, unsuitable for on-line monitoring and other time-critical and full spectrum measurement applications.In the study of the technology of multi-channel reflectance differential spectrometer based on photoelastic modulator , A new multi-channel measurement framework is proposed based on the combination of virtual instrument technology, high-speed multi-channel synchronous acquisition card and digital phase-locked amplification algorithm.The experiment shows that the standard deviation of the new method in the whole spectrum is less than 10-3 , In the instrument development has a combination of flexibility, good scalability advantages.