我们已经研究了在大直径高速静压轴承的设计中,油液粘度与结构参数的关系(见《半导体设备》83年第三期),改进了切片机主轴的静压支承,降低了摩擦功率,取得了明显的效果。 现在,我们再来研究一下静压轴承的结构形式同摩擦功率及其他参数的关系,寻求进一步降低主轴摩擦功率,改进切片机主轴静压系统的途径。 以往我们讨论的一直是圆柱径向支承和轴向止推支承。为了同时限定转动件的径向和轴向运动,我们很自然地想到在圆锥面上设置油腔——这就是圆锥静压轴承。 由于圆锥轴承中每个油腔必须同时承受径 We have studied the relationship between oil viscosity and structural parameters in the design of large diameter high speed hydrostatic bearings (see Semiconductors Equipment, Issue 83, Issue 3), improved hydrostatic support of the microtome spindle and reduced frictional power , Achieved remarkable results. Now, let us examine the hydrostatic bearing structure with the friction power and other parameters of the relationship to find ways to further reduce the spindle friction power, improve the static pressure system of the spindle spindle microtome. In the past we have been discussing cylindrical radial bearings and axial thrust bearings. In order to limit the radial and axial movement of the rotor at the same time, we naturally think of the oil chamber in the cone - this is the cone hydrostatic bearings. Since each oil cone in tapered bearings must withstand the same diameter