本文提出一种优于模拟量输出的数字化传感器.由温度敏感级、加热级和施密特触发器与在加热级和温敏级间的衬底热通路一起构成一个闭环传感器系统.该系统工作在加热和冷却的振荡状态,产生方波输出,其脉宽用作为真空度的量度.该传感器由通用的CMOS技术制备,本文给出了不同真空度下的理论分析与实验结果. In this paper, a digital sensor superior to analog output is proposed, and a closed-loop sensor system is formed by the temperature-sensitive stage, the heating stage and the Schmitt trigger and the substrate thermal path between the heating stage and the temperature-sensitive stage. The square wave output is generated during the heating and cooling oscillations, and its pulse width is used as a measure of the degree of vacuum.The sensor is fabricated by a common CMOS technique, and the theoretical analysis and experimental results for different vacuum degrees are given.