论文部分内容阅读
利用电化学刻蚀,制备了由一个Fabry-Perot微腔夹于两个Bragg反射镜中的多孔硅微腔光学晶体.扫描电子显微镜(SEM)清晰揭示了这种结构的“三明治”式物理构造.通过改变阳极氧化参数,可以调节这种结构的光学特性.而通过合适的热氧化和表面化学修饰,这种结构可以用于环境污染物(如挥发性有机物乙腈、甲苯、环己烷、三氯甲烷、丙酮、乙醇的蒸汽和室内装修气体甲苯、氨气、甲醛)的光学传感检测.其中,热氧化和化学修饰过程由傅里叶红外光谱(FTIR)得以证实,而传感过程则通过修饰后的多孔硅微腔对目标分析物的光学响应得以实现.这种基于多孔硅微腔的光学传感器具有良好的稳定性、敏感性和选择性,因此在气体传感和环境检测中具有广阔的应用前景.
Porous silicon microcavity optical crystals, sandwiched between two Bragg mirrors by a Fabry-Perot microcavity, were prepared by electrochemical etching. Scanning electron microscopy (SEM) clearly reveals the “sandwich” structure of this structure Physical Structure The optical properties of this structure can be tuned by changing the anodization parameters, which can be applied to environmental contaminants such as volatile organic compounds such as acetonitrile, toluene and cyclohexane by suitable thermal and surface chemical modifications , Chloroform, acetone, ethanol steam and interior decoration gas toluene, ammonia, formaldehyde), of which thermal oxidation and chemical modification were confirmed by Fourier transform infrared spectroscopy (FTIR), while sensing The process is achieved through the optical response of the modified porous silicon microcavity to the target analyte.The optical sensor based on the porous silicon microcavity has good stability, sensitivity and selectivity, so in gas sensing and environmental testing In the broad application prospects.