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This paper proposes an experimental approach for monitoring and inspection of the formation accuracy in ultra-precision grinding (UPG) with respect to the chatter vibration.Two factors related to the grinding progress,the grinding speed of grinding wheel and spindle,and the oil pressure of the hydrostatic bearing are taken into account to determining the accuracy.In the meantime,a mathematical model of the radius deviation caused by the micro vibration is also established and applied in the experiments.The results show that the accuracy is sensitive to the vibration and the forming accuracy is much improved with proper processing parameters.It is found that the accuracy of aspheric surface can be less than 4μm when the grinding speed is 1400r/min and the wheel speed is 100r/min with the oil pressure being 1.1 MPa.