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设计了一种半导体激光干涉测量仪 ,可以实时测量物体的微小振动。通过信号处理电路对干涉信号进行分析 ,得到实际振动的振幅和频率。给出了具体的理论分析。实验结果验证了该干涉仪的实用性。
A semiconductor laser interferometer was designed to measure the tiny vibration of objects in real time. Through the signal processing circuit of the interference signal analysis, the actual vibration amplitude and frequency. Gives a specific theoretical analysis. Experimental results verify the practicality of the interferometer.