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以硝酸钙、醋酸铅和钛酸丁酯为原料,甲醇做溶剂,乙酰丙酮为稳定剂。用简单的溶胶-凝胶法和快速退火工艺在Pt/Ti/SiO2/Si(100)基片成功地制备出四方钙钛矿相(Pb0.76Ca0.24)TiO3(PCT)薄膜。用原子力显微镜、扫描电镜分析了薄膜的表面和断面形貌;测试了薄膜的铁电和介电特性。PCT薄膜的剩余极化强度和矫顽场分别为36μC/cm2和240kV/cm,在100kHz,薄膜的介电常数和损耗因子分别为295和0.027。
Calcium nitrate, lead acetate and butyl titanate as raw materials, methanol as a solvent, acetylacetone as a stabilizer. A tetragonal perovskite (Pb0.76Ca0.24) TiO3 (PCT) thin film was successfully prepared on a Pt / Ti / SiO2 / Si (100) substrate by a simple sol-gel method and a rapid annealing process. The surface and cross-sectional morphology of the films were analyzed by atomic force microscopy and scanning electron microscopy. The ferroelectric and dielectric properties of the films were tested. The remanent polarization and coercive field of the PCT films were 36μC / cm2 and 240kV / cm, respectively. At 100kHz, the dielectric constant and dissipation factor of the films were 295 and 0.027, respectively.