硼微晶玻璃片(PWB)是一种新型的平面固体扩散源。大量的实践证明,PWB具有热稳定性好、不易吸潮、工艺简单、不粘硅片、易于保存、扩散均匀性和重复性好、成本低、寿命长等一系列特点,因此,它是目前比较理想的硼扩散源。 Boron crystallized glass (PWB) is a new type of planar solid diffusion source. A large number of practices have proved that PWB has a series of features such as good thermal stability, easy to absorb moisture, simple process, non-stick silicon, easy storage, good diffusion uniformity and repeatability, low cost and long service life. Therefore, The ideal source of boron diffusion.