【摘 要】
：
以非晶Ni-Al薄膜作为Cu互连的阻挡层材料,采用射频磁控溅射法构架了Cu/Ni-Al/Si的异质结。利用原子力显微镜、X射线衍射仪和四探针测试仪研究了不同温度下高真空退火样品的表
【机 构】
：
河北大学物理科学与技术学院,燕山大学亚稳材料制备技术与科学国家重点实验室,河北大学电子信息工程学院,
论文部分内容阅读
以非晶Ni-Al薄膜作为Cu互连的阻挡层材料,采用射频磁控溅射法构架了Cu/Ni-Al/Si的异质结。利用原子力显微镜、X射线衍射仪和四探针测试仪研究了不同温度下高真空退火样品的表面形貌、微观结构与输运性质。实验发现非晶Ni-Al薄膜在高达750℃的退火温度仍能保持非晶结构,各膜层之间没有明显的反应和互扩散存在,表明了非晶Ni-Al薄膜具有良好的阻挡效果,可以用作Cu互连的阻挡层材料。
An amorphous Ni-Al thin film was used as a barrier material for Cu interconnection. The heterojunction of Cu / Ni-Al / Si was fabricated by RF magnetron sputtering. The surface morphology, microstructure and transport properties of high vacuum annealed samples at different temperatures were investigated by atomic force microscopy, X-ray diffraction and four-probe test. It has been found that the amorphous Ni-Al films can maintain the amorphous structure at the annealing temperature of up to 750 ℃. There is no obvious reaction and interdiffusion between the films, which shows that the amorphous Ni-Al films have good barrier effect, It can be used as a barrier material for Cu interconnects.
其他文献
Chemical bond properties of YBa2Cu3O7 were studied by using the average band-gap model. The calculated results show that the covalency of Cu(1)-O bond is 0.406,
Human acidic and basic fibroblast growth factors (aFGF and bFGF) are classic and well characterized members of the heparin-binding growth factor family. Heparin
The convenient and useful raying mode was selected to develop the analysis module of ultrasonic parameters, and the simulation of ultrasonic propagation in typi
Molecular dynamics simulation using a universal force field has been employed to determine the diffusion coefficients of O2 and Na2SO4 vapor into B2O3 and SiC f
Partially stabilized zirconia ceramics were sintered using fine powder of ZrO2-3mol%Y2O3 prepared by the chemical co-precipitation method.The tetragonal-to-mono
With the development of computer technology and finite element method, the priority research area of plasticforming has focused on 3D FE simulation of forming p
Based on the experimental data of KY3F10∶Tm3+ reported by Diaf, Kushida′s spectral overlap model (SOM) of energy transfer between J-multiplets was studied. Fi
用分形理论能描述具有强烈非线性特征的煤粉孔隙结构,利用氮吸附仪分析得到10种煤样的孔隙分形维数为2.572～2.722,利用Haake黏度计测量水煤浆黏度,讨论了孔隙分形、水分、氧量
By using an LKB2277 BioActivity Monitor (heat conduction microcalorimeter),stopped-flow method,the thermogenetic curves of Escherichia coli growth at 37℃ inhib
细长颗粒的循环流化在工业生产中具有非常广泛的应用,如生物质秸杆在循环流化床中的燃烧,烟丝存循环流化床中的干燥或加湿等.细长颗粒的流化特性受颗粒间撞及当地气场风速等