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由于材料尺度的限制,微纳器件的制作工艺一般较为复杂。以ZnO,SnO2和石墨粉为原料,采用化学气相沉积(CVD)法成功制备出长度达厘米级别的分等级结构ZnO微米线。分别通过立体显微镜、场发射扫描电子显微镜(FE-SEM)和X射线粉末衍射仪(XRD)对样品的形貌和结构进行表征。结果表明所制备的材料其一级结构为ZnO微米线,二级机构为四周均匀生长的ZnO微米短棒。设计制作出一种基于单根ZnO微米线的自供电传感器,并以乙醇为目标检测物进行敏感性能测试。结果表明:在不加外部电源的情况下,接触乙醇液体可以得到0.15 V的输出电压或25 nA的输出电流。
Due to the material size limitations, the manufacturing process of the micro-nano device is generally more complicated. Using ZnO, SnO2 and graphite powder as raw materials, the graded ZnO nanowires with a length of centimeter were successfully prepared by chemical vapor deposition (CVD). The morphology and structure of the samples were characterized by stereomicroscopy, field emission scanning electron microscopy (FE-SEM) and X-ray powder diffraction (XRD). The results show that the primary structure of the prepared material is ZnO micrometer wire, and the secondary structure is a ZnO micrometer short rod with uniform growth around. A self-powered sensor based on a single ZnO micrometer wire was designed and manufactured, and the sensitivity test of ethanol was carried out. The results show that an ethanol output of 0.15 V or 25 nA can be obtained without external power.