现代大多数真空淀积系统,利用石英敏感器监控薄膜厚度。其他监控方法还有电离计、光学反射以及电阻监控器。这些方法虽然也能够监控薄膜厚度,但石英晶体监控器是最有力的控制系统。经过改进,从频率测量到周期测量,以及现在引进声学阻抗因子,使石英晶体监控器保持它的声誉。 Most modern vacuum deposition systems use quartz sensors to monitor film thickness. Other monitoring methods include ionization meters, optical reflectors, and resistance monitors. Although these methods can also monitor the film thickness, but quartz crystal monitor is the most powerful control system. Improved, from frequency measurement to period measurement, and now the introduction of acoustic impedance factor, the quartz crystal monitor to maintain its reputation.