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一种灵敏的光激励谐振器压力传感感 近年来硅微机械谐振传感器,特别是用光热方法激励和光学方法检测谐振器固有频率的那些传感器显示出很强生命力。谐振结构的固有频率与结构尺寸和材料性质(如杨氏模量和密度)有关,也与可能作用于该结构的内应力有关。因此这类敏感器件有测最作用力的固有能力。
A Sensitive Photo-Induced Resonator Pressure-Sensing Sensing Silicon micromechanical resonant sensors, particularly those that use photothermal method excitation and optical methods to detect the natural frequencies of resonators, have shown strong vitality in recent years. The natural frequency of a resonant structure is related to the size of the structure and the material properties (such as Young’s modulus and density) and to the internal stresses that may act on the structure. Therefore, these sensitive devices have the inherent ability to measure the most force.