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高真空静电支承式旋转系统中,偏心转子在磁场和静电力矩作用下,产生转速衰减,从而降低了系统精度。该文建立了静电力矩的数学模型,确定了支承系统频率特性与静电力矩大小之间的关系。在此基础上设计了含陷波滤波器、带宽相对较低的支承系统,以改善其局部频率特性,消除静电力矩引起的转速衰减。实验给出了常规和改进支承系统的转速测量结果,并进行了比较,从中分离出静电力矩的大小。结果表明,通过改变支承控制系统局部频率特性,可以消除静电降速力矩,最终提高了转子转速的长期稳定性。
In the high-vacuum electrostatic supporting rotating system, the eccentric rotor generates the speed decay under the action of the magnetic field and the electrostatic moment, so as to reduce the system accuracy. In this paper, a mathematical model of electrostatic moment is established to determine the relationship between the frequency characteristics of bearing system and the magnitude of electrostatic moment. On this basis, a notch filter and a relatively low bandwidth support system are designed to improve the local frequency characteristics and eliminate the decay of speed caused by electrostatic torque. The experimental results show that the rotating speed of the conventional and improved supporting system is compared and the magnitude of the electrostatic moment is separated. The results show that the static decelerating torque can be eliminated by changing the local frequency characteristics of the supporting control system, which eventually improves the long-term stability of the rotor speed.