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构建了一种硅基PMMA/SiO2-ZrO2有机-无机复合光波导结构,采用溶胶-凝胶法在硅基底上制备厚度约17μm的PMMA薄膜作为包层材料,在硅基PMMA上制备了具有紫外感光性的SiO2-ZrO2基有机-无机复合芯层薄膜.测得PMMA和SiO2-ZrO2基复合薄膜在光纤常用通讯窗口0.85,1.31,1.55μm波长附近的折射率差比δ分别为4.81%,4.55%,4.50%.利用芯层材料自身的感光性,结合紫外辐照技术,制备了硅基PMMA/SiO2-ZrO2基有机-无机复合光波导阵列图形,其最小宽度约25μm,厚度约5μm,图形规整、边缘清晰.通光实验表明该波导能够将波长1.53~1.55μm的光限制在波导内,实现光的传输和分束.
A silicon-based PMMA / SiO2-ZrO2 organic-inorganic composite optical waveguide structure was prepared. A PMMA thin film with a thickness of about 17μm was prepared as a cladding material on a silicon substrate by a sol-gel method. The refractive index difference ratios (δ) of PMMA and SiO2-ZrO2-based composite films near the common optical fiber communication wavelength of 0.85, 1.31 and 1.55μm were 4.81% and 4.55 % And 4.50%, respectively.Using the self-photosensitivity of the core material and the UV irradiation technology, a series of organic-inorganic composite optical waveguide arrays of Si-based PMMA / SiO2-ZrO2 were prepared with a minimum width of 25μm and a thickness of about 5μm. Regularity and clear edge.It is shown that the waveguide can confine the light with the wavelength of 1.53-1.55μm in the waveguide and realize the transmission and splitting of the light.