利用水溶液法制备了Au纳米粒子水溶胶, 透射电镜观察, Au纳米粒子的平均粒径为29nm. 将此溶胶滴至干净的单晶硅(110)表面上, Au纳米粒子自组装形成分形结构. 通过控制温度, 所得的分形结构表现出不同的形貌特点. 利用光学显微镜观察Au纳米粒子的聚集分形生长过程, 用原子力显微镜对分形结构的表面形貌进行表征, 讨论了分形生长机理. Au nanoparticle hydrosol was prepared by aqueous solution method. The average particle diameter of Au nanoparticles was 29 nm by transmission electron microscopy. The sol was dropped onto the surface of clean monocrystalline silicon (110), and the Au nanoparticles self-assembled to form a fractal structure. By controlling the temperature, the fractal structure showed different morphological characteristics.Using optical microscopy to observe the aggregation fractal growth of Au nanoparticles, the surface morphology of the fractal structure was characterized by atomic force microscopy, and the fractal growth mechanism was discussed.