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设计了一种能够工作在140~325 GHz频带的宽带准光检波器,由一颗高阻硅透镜和单片集成检波芯片组成.设计并加工出双缝天线,在天线馈电端集成了肖特基二极管,该紧凑结构使其能够接收空间中的太赫兹辐射并转换为基带信号.为增强片上天线的方向性,利用MLFMM算法进行了扩展半球硅透镜的设计和优化,实现了良好的辐射特性.通过测试,天线在220 GHz和324 GHz处的辐射增益分别为26 dB和28 dB.在140~325 GHz,检波器测试得到的响应率可达到1 000~4 000 V/W,对应的等效噪声功率(NEP)估算为0.68~2.73pW/Hz(1/2).
A wide-band quasi-photodetector capable of operating in the frequency range of 140-325 GHz is designed and consists of a high-resistance silicon lens and a single integrated detector chip. The double-stranded antenna is designed and fabricated. The integrated antenna The compact structure allows it to receive terahertz radiation in space and convert it into a baseband signal. To enhance the on-chip antenna directivity, an extended hemispherical silicon lens is designed and optimized using the MLFMM algorithm to achieve good radiation Characteristics The antenna gains 26 dB and 28 dB of radiation at 220 GHz and 324 GHz, respectively, and the responsivity of the detector at 140-325 GHz is 1 000-4 000 V / W, corresponding to The equivalent noise power (NEP) is estimated to be 0.68 to 2.73pW / Hz (1/2).