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随着 VL SI电路集成密度急剧增长及特征尺寸不断缩小 ,快速准确地计算三维互连寄生电容已成为集成电路辅助设计中一个研究热点。提出一种有效的多介质直接边界元方程组织方法。该方法排列直接边界元方程组中的源点和变量 ,使系数矩阵非零元分布极有规律 ,通过最少的数组存储非零矩阵块 ,以达到加快方程迭代求解的目的。该方法可应用于任意复杂结构的三维寄生电容计算 ,对介质数目较多的虚拟多介质计算 ,加速方程求解的效果尤其突出
With the rapid increase of integrated density of VLSI circuits and shrinking of feature size, the rapid and accurate calculation of three-dimensional interconnection parasitic capacitance has become a hot topic in the design of integrated circuits. An effective multi-media direct boundary element equation organization method is proposed. This method arranges the source points and variables in the direct boundary element equations to make the non-zero element distribution of the coefficient matrix very regular, and stores the non-zero matrix blocks with the minimum array to achieve the purpose of accelerating the iterative solution of the equations. This method can be applied to the calculation of the three-dimensional parasitic capacitance of any complex structure. Especially for the calculation of virtual multi-media with large number of media, the acceleration equation is particularly effective