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5. Influence of N2 flow rate on structure and properties of TiBCN films prepared by multi-cathodic arc

Influence of N2 flow rate on structure and properties of TiBCN films prepared by multi-cathodic arc

来源 :核技术：英文版 | 被引量 : 0次 | 上传用户：nesecueity

【摘 要】

：

TiBCN films were deposited on Si(100) and cemented carbide substrates by using multi-cathodic arc ion plating in C2H2 and N2 atmosphere. Their structure and mec

【作 者】

：

Bin Han Ze-Song Wang D. Neena 

【机 构】

：

KeyLaboratoryofArtificialMicro-andNano-MaterialsofMinistryofEducationandSchoolofPhysicsandTechnology

【出 处】

：

核技术：英文版

【发表日期】

：

2017年5期

【关键词】

：

TiBCN Nanocomposite N2 flow rate RUTHERFORD BACKSCATTERING SPECTROSCOPY (RBS) X- 

【基金项目】

：

This work was supported by the National Natural Science Foundation of China (Nos. 11375135 and 11275141), International Cooperation Program of the Ministry of Science and Technology of China (No.2015D

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TiBCN films were deposited on Si(100) and cemented carbide substrates by using multi-cathodic arc ion plating in C2H2 and N2 atmosphere. Their structure and mechanical properties were studied systematically under different N2 flow rates. The results showe

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