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本文描述了离子团束(ICB)镀薄膜装置与飞行时间质谱计(TOFMS)联合系统的研制,此系统不仅可以制备无机材料和有机聚合物薄膜而且还能制备金属超微粒子-有机聚合物薄膜。用TOFMS可对ICB镀的成膜过程进行原位分析和监控。对该系统中TOFMS部分的分辨本领和灵敏度进行了测试:选定质荷比为149的谱峰,得到该质谱计的分辨本领为165;该质谱计对Ar~(40)的最小可检分压强为4.0×10~(-6)Pa。本文也给出了ICB沉积聚乙烯薄膜的飞行时间质谱及其初步分析。
This paper describes the development of a combined system of ion beam (ICB) plating and TOFMS that can prepare inorganic ultrafine particles and organic polymer films as well as inorganic materials and organic polymer films. The TOFMS enables in-situ analysis and monitoring of the ICB plating film formation process. The resolving power and sensitivity of the TOFMS part of the system were tested. The mass spectrum of mass spectrometer 149 was selected and the resolving power of the mass spectrometer was obtained. The mass spectrometer was able to detect the minimum detectable concentration of Ar ~ (40) The pressure is 4.0 × 10 -6 Pa. The paper also gives the time-of-flight mass spectra of ICB deposited polyethylene films and their preliminary analysis.