在光刻工作中,用光刻显微镜将掩模上和硅片上的相应图形互相对准是关键工作之一。在人工对准的半自动光刻中,对准所花时间占整个光刻周期相当大的比例,工人劳动强度也较大。显微镜的质量不但影响产品质量,也关系到长期使用显微镜的工人身体 In lithography, using a lithography microscope to align the corresponding patterns on the mask and on the wafer is one of the key tasks. In manually aligned semi-automatic lithography, the alignment takes a considerable proportion of the entire lithography cycle and workers are labor-intensive. The quality of the microscope affects not only the quality of the product, but also the body of the worker who has been using the microscope for a long time