,Enhanced Second-Order Resonance Actuation and Frequency Response Modulation of Microcantilever by D

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We achieve enhanced actuation of the 2nd-order resonance of a microcantilever in a capacitive microcantilever structure featured by a dual coplanar counter electrodes configuration.A torque about the static point of the 2nd eigenmode is generated in this configuration and therefore enables effective actuation of the 2nd-order resonance.It is further confirmed that the torque has the effect of suppressing the 1st-order resonance.As a result,the frequency response curve of the microcantilever beam can be modulated.Our results suggest that electric actuation of any higher-order resonances of the microcantilever can be realized through a rational design of counter electrodes.
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