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当前,HgCdTe表面阳极氧化技术已取得了一定结果。关于阳极氧化层的组成国内外已有一些报导。文献[1,2,6]作者采用光学测量手段,由折射率数据判断,HgCdTe阳极氧化膜层为单一的TeO_2,这就给人们提出了一个问题,作为HgCdTe组成元素的Hg和Cd在氧化中起到什么作用呢?近几年由于表面分析技术的迅速发展和广泛应用,有可能直接确定膜层的组份。T.S.Sun和 R.F.C.Farrow采用x线光电子谱(XPS)技术和C-V测量研究了HgCdTe阳极氧化膜的表面组成和界面特性。本文采用俄歇电子能谱(AES)和XPS技术分析了3～5μm光导HgCdTe阳极氧化膜的
At present, HgCdTe surface anodization technology has achieved some results. There have been reports of the composition of the anodic oxide both at home and abroad. The authors [1, 2, 6] used optical measurement methods to determine the refractive index data, HgCdTe anodized film is a single TeO 2, which gives rise to a problem that Hg and Cd, which are constituent elements of HgCdTe, are oxidized In recent years due to the rapid development of surface analysis techniques and the widespread application, it is possible to directly determine the composition of the film. T.S.Sun and R.F.C. Farrow investigated the surface composition and interfacial properties of HgCdTe anodized films using x-ray photoelectron spectroscopy (XPS) and C-V measurements. In this paper, Auger electron spectroscopy (AES) and XPS analysis of 3 ~ 5μm light guide HgCdTe anodized film