论文部分内容阅读
文中介绍硅微机械谐振真空传感器的特点及配套研制的真空计。利用恒定振幅闭环测控电路方式，使整机具有良好的灵敏度和可靠性。真空度测量范围接近１０２～１０－１Ｐａ，测量响应速度为十几毫秒。
This paper introduces the characteristics of silicon micro-mechanical resonant vacuum sensor and supporting the development of the vacuum gauge. The use of constant amplitude closed-loop measurement and control circuit, so that the whole machine has good sensitivity and reliability. Vacuum measurement range close to 102 ~ 10-1Pa, measurement response speed of more than ten milliseconds.