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主要研究了无源压力传感器的无线信号传输性能。传感器结构由压力敏感电容空腔和电感天线组成,内部无需有源器件、电池等。通过压力敏感结构电感天线的金属层厚度、线宽等因素的改变来研究无线信号传输性能。经过实验测试,电感的品质因数Q对传感器的信号传输是有影响的。电感天线的金属层加厚、线宽加宽,可以减小电感的电阻,从而增大传感器电感的Q值,有利于无线信号的传输。
The main study of the passive pressure sensor wireless signal transmission performance. The sensor structure consists of a pressure-sensitive capacitor cavity and an inductor antenna, with no internal active components, batteries, etc. The wireless signal transmission performance is studied through the changes of metal layer thickness, line width and other factors of the inductive antenna with pressure-sensitive structure. After the experimental test, the quality factor of the inductor Q has an impact on the signal transmission of the sensor. Inductive antenna thickening of the metal layer, widening line width, can reduce the inductance of the inductor, thereby increasing the Q value of the sensor inductance is conducive to wireless signal transmission.