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笔者根据材料冲蚀磨损原理,分析探讨了微磨料水射流切割多晶硅硅锭的机理。并运用后混合微磨料射流切割装置,对多晶硅硅锭进行了单因素切割试验,从而获得了切割性能曲线。研究结果表明,微磨料水射流对多晶硅的切割完全可行,射流压力和横移速度是重要的试验数据。通过对高压磨料水射流切割性能的预测和加工参数的优化,最终建立切割表面质量经验模型,根据模型分析得出射流压力、横移速度与切割质量之间的关系。
According to the principle of material erosion and wear, the author analyzes the mechanism of cutting polycrystalline silicon ingot with micro abrasive water jet. After the mixed micro abrasive jet cutting device was used, the single-factor cutting test of polycrystalline silicon ingot was carried out, and the cutting performance curve was obtained. The results show that the micro abrasive water jet cutting of polysilicon is feasible, jet pressure and traverse speed is an important experimental data. Through the prediction of the cutting performance of high pressure abrasive water jet and the optimization of machining parameters, an empirical model of cutting surface quality is finally established. According to the model analysis, the relationship between jet pressure, traverse speed and cutting quality is obtained.