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介绍制作钛膜温度传感器的工艺过程以及绝缘膜、敏感膜、保护膜的沉积方法。测试了传感器的温度响应性能，并装于双圆盘机上进行弹性流体动力润滑实测，表明传感器对温度具有较好的分辨率反响应性；圆盘的滚动线速度增大，油膜温度升高。
Describes the production of titanium film temperature sensor process and insulation film, sensitive film, protective film deposition method. The temperature response performance of the sensor was tested and measured by elastic fluid dynamic lubrication on a double disk machine. The results show that the sensor has better resolution and response to temperature. The velocity of the rolling disk increases and the temperature of the oil film increases.