论文部分内容阅读
在扫描电子显微镜中,经电子光学系统聚焦的电子束以很大的速度入射到样品上,将产生多种信息(图一);分别利用这些信息,就可以对样品进行形貌观察、化学成份分析及晶体结构的研究。对样品形貌的观察,以利用二次电子信息为最好。收集、传输、放大这一信息,是由二次电子探测器(以下简称探头)来完成的。因而,二次电子探头是扫描电镜中一个重要部件。
In a scanning electron microscope, the electron beam focused by the electro-optical system is incident on the sample at a large velocity and will generate a variety of information (Figure 1). Using this information, the morphology of the sample can be observed. The chemical composition Analysis and Crystal Structure Research. The observation of the morphology of the sample to take advantage of secondary electronic information is best. Collecting, transmitting and amplifying this information is done by the secondary electron detector (hereinafter referred to as the probe). Therefore, the secondary electron probe is an important part of SEM.