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对微纳米三坐标测量机(CMM)高精度扫描探头的稳定性进行了分析.该扫描探头由带有球头的光纤探针、悬浮机构、二维角度传感器和微型迈克尔逊干涉仪4部分组成.光纤探针和悬浮片固定在一起,当光纤探针的球头受到触碰时,会带动悬浮机构的悬线发生形变,进而导致贴在悬浮片上的平面反射镜倾斜或在竖直方向上发生位移,前者由二维角度传感器进行感测,后者由微型迈克尔逊干涉仪进行感测.实验结果表明,环境温度的变化是影响探头稳定性的主要因素,探头中机械结构和部件对温度变化的敏感性要远远大于探头中光电器件对温度变化的敏感性.只要将探头放到一个恒温箱中,待恒温箱温度稳定4 h再开始测量,探头即可达到1 nm的分辨力和30nm的测量标准差.
The stability of high precision scanning probe of micro-nano CMM is analyzed.The probe consists of four parts: fiber probe with ball head, suspension mechanism, two-dimensional angle sensor and micro-Michelson interferometer When the probe of the optical fiber probe is touched, it will drive the hanging wire of the floating mechanism to deform, which will cause the flat mirror attached to the floating plate to tilt or be vertical The former is sensed by a two-dimensional angle sensor and the latter is sensed by a miniature Michelson interferometer.The experimental results show that the change of the ambient temperature is the main factor that affects the stability of the probe, and the mechanical structure and components in the probe are sensitive to temperature The sensitivity of the change is much greater than the sensitivity of the optoelectronic device to the temperature change in the probe.As long as the probe is placed in a thermostat and the temperature of the thermostat is stable for 4 hours and then the measurement is started, the resolution of the probe can reach 1 nm 30nm measurement standard deviation.