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离心标定修正微加速度计的非线性存在周期长和成本高等缺点,寻找一种可以提高生产效率的修正办法具有重要意义。推导了理想情况下加速度计的工作原理,并对载波带来的附加静电力对测试结果的影响进行了分析。在引入闭环平衡时结构非对称因子后推导出导致非线性的公式,找到了影响闭环平衡后结构非对称的三个主要因数:寄生电容、结构本身不对称和伺服电路零位的偏差。分析了各个因素在闭环平衡状态对结构非对称的影响原理后,相应提出了提高加速度计线性度的方法。最后介绍了非线性补偿的工程实现方法,并对环境温度变化较大时的补偿方法给出了建议。实验表明,该技术切实可行,能将加速度计的非线性特性提高将近一个数量级。
Centrifugally calibrated micro-accelerometer nonlinearity has the disadvantages of long cycle length and high cost. It is of great significance to find a correction method that can improve the production efficiency. The working principle of the accelerometer under ideal conditions is deduced, and the influence of additional electrostatic force brought by the carrier wave on the test results is analyzed. The non-symmetry factor in the closed-loop equilibrium is introduced to deduce the formula that leads to nonlinearity. The three main factors that affect the asymmetry of the closed-loop equilibrium are found: parasitic capacitance, asymmetry of the structure itself and zero deviation of the servo circuit. After analyzing the influence of various factors on the asymmetric structure of the closed-loop, a method to improve the linearity of the accelerometer is proposed. Finally, the engineering implementation method of nonlinear compensation is introduced, and the compensation method is given when the ambient temperature changes greatly. Experiments show that this technique is feasible and can improve the nonlinearity of the accelerometer nearly an order of magnitude.