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本文报道了用于多光束分束器的反射式16位相值二元光学器件的制作。该二元光学器件把一束光束分成5×5光束阵列。测量的衍射效率为76.16%,接近理论设计值79.68%。该二元光学器件的有效孔径为10mm×10mm。
This paper reports the fabrication of a reflective 16-bit binary optical device for multibeam splitters. The binary optics split a beam into 5 × 5 beam arrays. The measured diffraction efficiency was 76.16%, close to the theoretical design value of 79.68%. The effective aperture of the binary optics is 10mm × 10mm.