真空集热管镀膜机推广应用新技术———双路质量流量控制器在太阳能真空集热管选择性吸收涂层铝靶磁控溅射镀制工艺中，曾经采用自动压强控制器引入氩气，质量流量控制器引入反应性气体氮。经过长期的生产实践发现，自动压强控制器中有几个不稳定的因素：一是压电阀中的压... Vacuum Collector Coating Machine popularization and application of new technologies --- Dual Mass Flow Controller In the solar vacuum tube selective absorption coating aluminum target magnetron sputtering process, the use of automatic pressure controller to introduce argon, the quality The flow controller introduces reactive gas nitrogen. After a long period of production practice found that there are several automatic pressure controller instability factors: First, the piezoelectric valve pressure ...