论文部分内容阅读
本文在衍射理论基础上，深入分析了菲涅耳型衍射光学元件的特性，针对连续及二元浮雕结构，建立了位相深度因子（M），波长匹配系数（α）与衍射效率的关系式，对影响衍射效率的因素进行了讨论．研究了设计与工艺的匹配问题，建立了数值孔径，最小特征尺寸与衍射效率的关系，为不同波段衍射光学元件的应用，及设计和评价衍射光学元件提供了有效的理论方法．本文最后举例分析了用于白光波前传感器中的小数值孔径微透镜列阵的性能，并对衍射效率及传递函数两个综合指标进行了测量．
Based on the theory of diffraction, the characteristics of Fresnel-type diffractive optical elements are deeply analyzed. For continuous and binary relief structures, the relationship between phase depth factor (M), wavelength matching coefficient (α) and diffraction efficiency is established. The factors affecting the diffraction efficiency are discussed. The matching between design and process was studied. The relationship between numerical aperture, minimum feature size and diffraction efficiency was established. It provided an effective theoretical method for the application of diffractive optical elements in different wavebands and for the design and evaluation of diffractive optical elements. In the end of this paper, the performance of the micro-aperture micro-lens array used in the white-light wavefront sensor is analyzed. The two comprehensive indexes of the diffraction efficiency and the transfer function are measured.