一、前言高质量的直线测量基准在机械运动精度检测,加工误差的测量及补偿,高精度设备的安装以及变形监控等领域起十分重要的作用。准直测量较早时是采用拉丝(钢丝)基准和标准尺基准,其优点是简单、直观、在我国一些单位延用至今。然而,钢丝由于重力和气流会产生变形、抖动,直尺也会由于自重及装卡等问题产生变形,而且这些实体基准比较笨重,应用范围受到限制,已经无法满足现代加工业所提出 I. INTRODUCTION High-quality linear measurement standards play an important role in the field of mechanical motion detection, measurement and compensation of machining errors, installation of high-precision equipment, and deformation monitoring. Earlier alignment measurement is the use of wire (wire) benchmark and standard benchmark, the advantage is simple, intuitive, some units in our country so far. However, due to the deformation of the wire due to gravity and airflow, jitter, straightedge will also be due to self-weight and loading problems such as deformation, and these entities more clumsy benchmark, the application is limited, has been unable to meet the requirements of the modern processing industry