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在GCr15轴承钢基体上,利用多弧离子镀技术低温(175℃)沉积TiAl CN涂层。利用SEM、EPMA、XRD、附着力测试仪、纳米压痕仪和UMT-2高温摩擦磨损测试仪研究薄膜性质。结果表明,涂层表面光滑平整、均匀致密且无明显孔洞。涂层表面存在一定数量的液滴颗粒,薄膜厚度约为2μm。在涂层中,发现了晶体结构为fcc-Ti N结构,薄膜的晶粒大小为10~30 nm;随着薄膜中C元素的加入,XRD谱中(Ti0.5,Al0.5)N峰出现了宽化;在Ti Al N中引入C,附着力下降,随着涂层中C含量的增加,薄膜中的Al和Ti比例未发生明显变化,附着力略微增加,但硬度和弹性模量先增加后减小,摩擦系数一直减小。
On the GCr15 bearing steel substrate, the TiAl CN coating was deposited at a low temperature (175 ° C) using a multi-arc ion plating technique. The properties of the films were investigated by SEM, EPMA, XRD, adhesion tester, nanoindentation and UMT-2 high temperature friction and wear tester. The results show that the coating surface is smooth, uniform and dense with no obvious holes. A certain amount of droplet particles are present on the surface of the coating, with a film thickness of about 2 μm. In the coating, the crystal structure of fcc-TiN was found and the grain size of the film was 10-30 nm. With the addition of C, the (Ti0.5, Al0.5) N peaks in the XRD spectrum And the cohesion decreased. With the increase of C content in the coating, the proportion of Al and Ti did not change obviously, but the adhesion increased slightly, but the hardness and elastic modulus First increase and then decrease, the friction coefficient has been reduced.