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为实现同步辐射用光学元件面形的绝对检测,发展了镜面旋转对称三平板检测法。该方法将菲佐干涉法检测到的波前函数关于y轴分解成镜面对称部分与镜面非对称部分,再利用N次旋转取平均值消除镜面非对称部分,从而通过计算获得待测平面的绝对面形分布。推导了镜面旋转对称法检测矩形平面镜面形的公式,应用该方法设计了高精度矩形平面镜的测试实验,并进行了误差分析。实验结果表明,与传统三平板绝对测量方法相比较,两种方法在高度轮廓误差和斜率误差方面的计算结果都符合较好,其对比后的残差均方根(RMS)值分别为λ/500(λ=632.8nm)与0.93μrad。
In order to achieve the absolute detection of synchrotron radiation with the optical element surface shape, a mirror rotating symmetrical three-plate detection method has been developed. The method decomposes the wavefront function detected by Fizo interferometry into a mirror-symmetric part and a mirror-asymmetrical part with respect to the y-axis, and then eliminates the mirror asymmetrical part by using N times of rotation to obtain the absolute value of the plane to be measured Profile distribution. The formula of detecting the mirror plane of the rectangular plane by the mirror rotation symmetry method is deduced. The experiment of the high precision rectangular mirror is designed and the error analysis is carried out. The experimental results show that compared with the traditional three-plate absolute measurement method, the calculated results of the two methods are in good agreement with the height contour error and the slope error. The RMS values of the residuals after the comparison are λ / 500 (λ = 632.8 nm) and 0.93 μrad.