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目的 为发展纳米电子器件及纳米电子学技术寻找有效途径 .方法 对目前制造纳米电子器件的主要途径 ,例如基于三束的光刻加工技术、分子组装与纳米微粒排列技术、扫描力探针加工技术等进行了概略的介绍 ,讨论了各种方法所存在的优势与限制 .结果 对基于分子组装与纳米光刻的纳料制造技术给予很大的重视 .结论 认为综合若干种技术之长可能是我们目前实现特定纳料器件制造的有效途径
Objective To find effective ways to develop nanoelectronic devices and nanoelectronics technology.Methods The main approaches to fabricate nanoelectronic devices, such as three-beam lithography, molecular assembly and nanoparticle alignment, scanning probe processing , Etc. The advantages and limitations of each method are discussed.Results We attach great importance to the nanomaterial manufacturing technology based on molecular assembly and nanolithography.It is concluded that the combination of several techniques may be our An effective way to make a specific nanowire device is currently achieved