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综述了氮化铝面内伸缩模态的射频MEMS谐振器。氮化铝面内伸缩模态谐振器(contour-mode resonator,CMR)利用了氮化铝薄膜的压电效应,由器件的机械谐振再通过机电转化实现谐振功能,基本结构为电极层-氮化铝层-电极层。当前研究的两种典型的器件结构为方形振子梳齿电极结构和圆盘振子电容式结构。概述了氮化铝CMR的制备工艺,并重点介绍了磁控溅射法生长薄膜和ICP刻蚀等主要工艺环节。分别对氮化铝CMR的谐振频率、品质因子、温度稳定性和动态电阻等主要性能参数进行了理论分析,针对谐振器各参数的提升给出了具体的改进方向,同时讨论了某些性能的提升所带来的负面影响。氮化铝CMR具备面内集成的优点,随着器件频率的提高,将在无线通信领域具有广阔的应用前景。
The RF MEMS resonator with aluminum nitride in-plane stretching mode is reviewed. Aluminum nitride in-plane telescopic mode-resonator (contour-mode resonator, CMR) takes advantage of the piezoelectric effect of aluminum nitride film, the mechanical resonance of the device and then through the mechanical and electrical conversion to achieve resonant function, the basic structure of the electrode layer - nitride Aluminum layer - electrode layer. Two typical device structures studied in the present study are square dipole comb electrode structures and circular dipole capacitance capacitive structures. The preparation process of aluminum nitride CMR is summarized, and the main process steps of magnetron sputtering growth film and ICP etching are introduced. Resonance frequency, quality factor, temperature stability and dynamic resistance of aluminum nitride CMR have been analyzed theoretically. Specific improvement directions are given for the improvement of each parameter of resonator, and some properties of Enhance the negative impact. Aluminum nitride CMR with the advantages of in-plane integration, with the device frequency increases, will have broad application prospects in the field of wireless communications.