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激光等离子体软X射线光源是脉冲式光源 ,对这类光源的光谱诊断有几种方法。文章介绍了一种新的、实用的测量激光等离子体软X射线光源光谱的方法。此方法以低噪声的通道电子倍增器探测来自光源的ns量级的脉冲光信号 ,并由低噪声、响应快的电荷灵敏前置放大器进一步将其放大 ,前放的输出电荷与输入的脉冲信号的峰值成正比。使用这种方法测量了铜靶激光等离子体光源和氧、氪气体靶激光等离子体软X射线源在 8～ 30nm波段的光谱
Laser plasma soft X-ray light source is a pulsed light source, there are several ways to diagnose the spectrum of such light source. This paper introduces a new and practical method of measuring the laser plasma soft X-ray source spectrum. This method uses a low-noise path electron multiplier to detect ns-level pulsed light signals from a light source and further amplifies them by a low-noise, fast-response, charge-sensitive preamplifier. The output charge of the preamplifier is compared with the input pulse signal The peak is proportional to. This method was used to measure the spectra of copper target laser plasma source and oxygen and krypton gas laser laser plasma soft X-ray source in the 8-30 nm band