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木文主要通过观察加热的硅-玻璃系统在静电场下的电流-时间(I-t)曲线。及其与封接状态的对应关系,用耗尽层和电场力的概念描述了封接的物理过程,讨论了表面状况对封接的影响,建立了表面粗糙程度与封接电压、材料刚度等参数的制约关系式,给出了可靠封接的余件和完成封接的I-t曲线判据.
Muwen mainly through the observation of heated silicon - glass system in the electrostatic field under the current - time (I-t) curve. And the relationship between them and the sealing state, the physical process of the sealing is described by the concept of the depletion layer and the electric field force, the influence of the surface condition on the sealing is discussed, the surface roughness, the sealing voltage and the stiffness of the material are established The relationship between the parameters of the parameters, given the reliable sealing of the remaining pieces and to complete the sealing It curve criterion.