微机械谐振陀螺的有限元分析

来源 :东南大学学报(自然科学版) | 被引量 : 0次 | 上传用户:nail_dingding
下载到本地 , 更方便阅读
声明 : 本文档内容版权归属内容提供方 , 如果您对本文有版权争议 , 可与客服联系进行内容授权或下架
论文部分内容阅读
依据微机械谐振陀螺的结构和工作原理 ,利用ANSYS有限元仿真软件对微机械谐振陀螺的设计进行了计算和仿真 .首先计算了陀螺的驱动模态固有频率和检测模态的固有频率 ,分析了在检测方向的输出位移、哥氏力与输入驱动信号频率之间的关系 ,在这基础上 ,得出当驱动模态的固有频率与检测模态的固有频率比较接近时 ,输出哥氏力灵敏度较大 .同时还分析了内框架梁与外框架梁对陀螺驱动模态与检测模态固有频率的影响 ,并以此为基础 ,提出了调节陀螺驱动模态固有频率与检测模态固有频率的方法 According to the structure and working principle of MEMS gyroscope, the design and simulation of MEMS gyroscope are carried out by using ANSYS finite element simulation software.Firstly, the natural frequency of driving mode and the natural frequency of the modal are calculated, In the detection of the direction of the output displacement, Coriolis force and the input drive signal frequency relationship between, based on that, when the natural frequency of the driving mode and the detection mode of the natural frequency is relatively close, the output Coriolis force sensitivity And the influences of the inner frame beam and the outer frame beam on the gyro driving mode and the detecting mode natural frequency are analyzed.At the same time, it is proposed to adjust the natural frequency of the gyro-driven mode and the detection mode natural frequency method
其他文献
Secondary xylem development has long been recognized as a typical case of programmed cell death (PCD) in plants.During PCD,the degradation of genomic DNA is cat
对TC4进行以氨气为气源的离子氮化,氮化温度700℃,750℃,850℃,900℃,保温时间4小时.通过金相检验、显微硬度测定、X射线衍射结构分析,研究了离子氮化温度等参数对渗层深度、
The cucumber mosaic virus (CMV) isolate P1 caused very mild symptoms on many plant species. After serial passages by mechanical inoculation over five years, CMV
C2H2-type zinc finger proteins (ZFPs) are thought to play important roles in modulating the responses of plants to drought,salinity and oxidative stress.However
For natural water,method of water quality evaluation based on improved fuzzy matter-element evaluation method is presented.Two important parts are improved,the
用耦合模理论对长周期光纤光栅进行了简要分析,叙述了连续CO2激光脉冲写入制作的长周期光纤光栅技术的实验研究情况,实验过程中观测到模式耦合强度随光栅区域长度发生变化.
Background The role of the cerebral venous system (CVS) in intracranial pressure (ICP) regulation remains largely unclear.In the present study,the interaction b
针对成像器稳定装置中由于摩擦力距造成的跟踪误差这一问题,采用自适应滑模控制的方法对摩擦力矩进行有效补偿,并且提出了基于改进欧拉近似法从位置测量信号中获取速度信号的
Camalexin (3-thiazol-2'-yl-indole) is the major phytoalexin found in Arabidopsis thaliana.Several key intermediates and corresponding enzymes have been identifi