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采用线性阳极层离子束技术制备了类金刚石薄膜(DLC膜),研究了不同衬底负偏压和测试环境对DLC薄膜摩擦学性能的影响.结果表明:在-50V偏压下,薄膜硬度和弹性模量最大,这主要与薄膜中高的sp3含量相关;衬底负偏压对薄膜在室温大气条件下的摩擦学性能影响不显著,薄膜总体呈现较低的摩擦系数和磨损率,显示出优异的抗磨损性能;线性离子束制备的含氢DLC薄膜的摩擦学行为受湿度及环境气氛影响较大,归因于环境中的氧气和水分造成的摩擦化学反应.
The DLC film was prepared by linear anode layer ion beam technique and the effect of negative substrate bias and test environment on the tribological properties of DLC films was investigated. The results show that under -50 V bias, the film hardness and The elastic modulus is the largest, which is mainly related to the high content of sp3 in the film. The negative bias of the substrate has no significant effect on the tribological properties of the film under room temperature and atmospheric conditions. The overall film shows a lower coefficient of friction and wear rate, showing excellent The tribological behavior of hydrogen-doped DLC films prepared by linear ion beam is greatly affected by humidity and ambient atmosphere, which is attributed to the tribochemical reaction caused by oxygen and moisture in the environment.